介绍制品
IMS-3000
IMS-3000-4L(4Load Port) ｜ IMS-3000-2L(2Load Port)
Detail view
Specification
Use 2 Load port
1 wafer transfer robot (single arm, Edge handling, Wafer flip option)
FFU, Ionizer, RFID-Reader
Support FOUP, FOSB, Open Cassette
Auto recognition of Carrier type (FOUP, FOSB, Open Cassette)
Logging Cassette Information
Wafer Flip Function
Other 整体视图